| Article | |
| Title | Improved Techniques for Characterization and Optimization of SIMOX Implantation |
| Author(s) | Dolan, R ; McKenna, C ; Richards, S ; Aoki, Y ; Nakai, T ; Nakamura, S ; Walden, M |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.578-581 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.578-581 |
Record creato 2007-03-14, modificato l'ultima volta il 2008-01-31
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Published version from AIP
Published version from AIP