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Article
Title	Modified Phasor-Particle Model of Treating A Blocking Capacitor As A Phasor Element in Simulation of Plasma Coupling with An External Auto-Matching Network
Author(s)	Kwok, Dixon T K ; Chu, Paul K
Publication	2006
In:	AIP Conf. Proc. 866 (2006) pp.245-248
In:	16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.245-248