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	��źű�� VIB-15c	��ɼ��	��Χ 0��25mm/s��Чֵ�� �� ��5%	Ǣѯ
	�񶯲�� VIB-11	��ɼ��	��ٶȣ�0.1-199.9m/s*s �١��ȣ�0.1-199.9mm/s λ��ƣ�0.001-1.999mm	Ǣѯ
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