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Characterization of 3D Trench PZT Capacitors for High Density FRAM Devices by Synchrotron X-ray Micro-diffraction / Shin, Sangmin ; Han, Hee ; JunPark, Yong ; Choi, Jae-Young ; Park, Youngsoo ; Baik, Sunggi
2007 - Published in : AIP Conf. Proc.: 879 (2007) , pp. 1554-1556 External link: Published version from AIP
In : 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1554-1556

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