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Wavefront Metrology for EUV Projection Optics by Soft X-ray interferometry in the NewSUBARU / Niibe, Masahito ; Sugisaki, Katsumi ; Okada, Masashi ; Kato, Seima ; Ouchi, Chidane ; Hasegawa, Takayuki 2007 - Published in : AIP Conf. Proc.: 879 (2007) , pp. 1520-1523 External link: Published version from AIP In : 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1520-1523 Record dettagliato

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