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CERN Document Server Pronađeno je 1 zapisa  Pretraživanje je potrajalo 0.72 sekundi 
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Positron annihilation lifetime spectroscopy (PALS) application in metal barrier layer integrity for porous low- k materials / Simon, Lin ; Jia Ning Sun ; Gidley, D W ; Wetzel, J T ; Monnig, K A ; Ryan, E T ; Simon, Jang ; Douglas, Yu ; Liang, M S ; En, W G et al.
Positron Annihilation Lifetime Spectroscopy (PALS) is a useful tool to pre-screen metal barrier integrity for Si-based porous low-k dielectrics. Pore size of low-k, thickness of metal barrier Ta, positronium (Ps) leakage from PALS, trench sidewall morphology, electrical test from one level metal (1LM) pattern wafer and Cu diffusion analysis were all correlated. [...]
2002
In : Materials Issues in Novel Si-Based Technology, Boston, MA, USA, 26 - 28 Nov 2001, pp.229-34
Detaljnije

Također vidi: slična imena autora
26 Liang, M
6 Liang, M C
2 Liang, M H
8 Liang, M J
2 Liang, Mai-Lin
1 Liang, Man-Chun
4 Liang, Mao-Chang
1 Liang, Mengning
7 Liang, Min
5 Liang, Ming
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