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Wavefront Metrology for EUV Projection Optics by Soft X-ray interferometry in the NewSUBARU / Niibe, Masahito ; Sugisaki, Katsumi ; Okada, Masashi ; Kato, Seima ; Ouchi, Chidane ; Hasegawa, Takayuki
2007 - Published in : AIP Conf. Proc.: 879 (2007) , pp. 1520-1523 External link: Published version from AIP
In : 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1520-1523
Detailed record - Similar records

See also: similar author names
230 Kato, S
14 Kato, S.
1 Kato, Sadayuki
1 Kato, Seiji
16 Kato, Seikou
4 Kato, Shigeki
2 Kato, Shin-ichi
3 Kato, Shinya
1 Kato, Shogo
22 Kato, Shoji
1 Kato, Shougo
1 Kato, Shuichi
1 Kato, Susumu
8 Kato, Syu
22 kato, Shoji
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