CERN Accelerating science

Article
Title	The DARPA Compact Superconducting X-Ray Lithography Source Features
Author(s)	Heese, R ; Kalsi, S ; Leung, E
Publication	1991
In:	14th IEEE Particle Accelerator Conference, San Francisco, CA, USA, 6 - 9 May 1991, pp.2652
Subject category	Accelerators and Storage Rings