| Главная страница > Advanced capabilities and applications of a sputter-RBS system |
| Article | |
| Title | Advanced capabilities and applications of a sputter-RBS system |
| Author(s) | Brijs, B ; Beyer, G ; Deleu, J ; Vandervorst, W |
| Publication | 1998 |
| In: | 15th International Conference on the Applications of Accelerators in Research and Industry, Denton, TX, USA, 4 - 7 Nov 1998, pp.586-591 |