| Home > 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| Conference | |
| Conference title | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996 |
| Date(s), location | 28 - 31 May 1996, Atlanta, GA, USA |
| Editor(s) | Pang, S W (ed.) |
| Imprint | 1996 |
| In: | J. Vac. Sci. Technol. B 14, 6 (1996) |
| Subject category | Engineering |
| Free keywords | beam-optics ; dry etching ; metrology |
Contributions to this conference in CDS
| Development of ion sources for ion projection lithography (p. 3947) |
| by Lee, Y |