| Preprint | |
| Report number | LBL-38196 |
| Title | Application of a pulsed, RF-driven, multicusp source for low energy plasma immersion ion implantation |
| Author(s) | Wengrow, A B ; Leung, K N ; Perkins, L T ; Pickard, D S ; Rickard, M ; Williams, M D ; Tucker, M |
| Publication | 1996 |
| Imprint | Jun 1996 |
| Number of pages | 8 |
| Presented at | 11th International Conference on Ion-implantation Technology, Austin, TX, USA, 17 - 21 Jun 1996 |
| Subject category | Accelerators and Storage Rings |
Záznam vytvorený 1996-09-25, zmenený 2017-01-12
TIF