| Article | |
| Title | Hydrogen ion implantation mechanism in GaAs-on-insulator wafer formation by ion-cut process |
| Author(s) | Woo, H J ; Choi, H W ; Kim, G D ; Kim, J K ; Hong, W ; Lee, H R |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.308-312 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.308-312 |
レコード 生成： 2007-03-14, 最終変更： 2008-01-31
External link:
Published version from AIP
Published version from AIP