Fabrication of diffraction-encoded micro-particles using nano-imprint lithography

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Published 28 June 2007 2007 IOP Publishing Ltd
, , Citation Shahanara Banu et al 2007 J. Micromech. Microeng. 17 S116DOI 10.1088/0960-1317/17/7/S08

0960-1317/17/7/S116

Abstract

A nano-imprint lithography technique is described for the fabrication of optically encoded micro-particles (diffractive barcodes). The particles are fabricated from SU8—a material which can be processed lithographically, and which can be used for the attachment of molecular tags. The barcodes are identified by their unique diffraction patterns.

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10.1088/0960-1317/17/7/S08