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Description For the given target pattern, both DUV and EUV are expected to require 4 masks. EUV's extra masks are for cutting lines to maintain sufficiently small distance between line ends.refJ. Van Schoot et al., Proc. SPIE 11147, 1114710 (2019).</ref> Since subresolution assist features (SRAFs) in the gap locations may stochastically print as dense features or defects,refP. De Bisschop and E. Hendrickx, Proc. SPIE 10957, 109570E (2019).</ref>refP. De Bisschop and E. Hendrickx, Proc. SPIE 10583, 105831K (2018).</ref> fixed pitch lines are assumed to be first EUV exposure.
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2020-01-05 03:09:09 1493 × 668 Guiding light relabel DUV example
2020-01-05 00:27:22 1512 × 668 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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