salicide: difference between revisions

{{en-noun}}

 

# {{lb|en|silicon microelectronics}} An electrical contact made from a [[silicide]] whose formation does not require lithographic patterning processes, i.e. it is "self-aligned"

#* {{quote-journal|date=11 November 1983|author=T. Paul Chow and Andrew J. Steckl|url=http://ieeexplore.ieee.org/stamp/stamp.jsp?tp=&arnumber=1483228|title=Refractory Metal Silicides: Thin-Film Properties and Processing Technology|journal=IEEE Trans. on Electron Devices|volume=ED-30|issue=11, November 1983|page=1480-1497|passage=Composite: Self-aligned silicide/poly Si gate ('''salicide''') (label on Figure 7d)}}