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Germanium ion implantation to Improve Crystallinity during Solid Phase Epitaxy and the effect of AMU Contamination / Lee, K S ; Yoo, D H ; Son, G H ; Lee, C H ; Noh, J H ; Han, J J ; Yu, Y S ; Hyung, Y W ; Yang, J K ; Song, D G et al.
2006 - Published in : AIP Conf. Proc.: 866 (2006) , pp. 140-143 External link: Published version from AIP
In : 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.140-143

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