| Article | |
| Report number | LBL-38161 |
| Title | Development of ion sources for ion projection lithography |
| Author(s) | Lee, Y ; Gough, R A ; Kunkel, W B ; Leung, K N ; Perkins, L T ; Pickard, D S ; Sun, L Z ; Vujic, J L ; Williams, M D |
| Publication | 1996 |
| Imprint | Jul 1996? |
| Number of pages | 18 |
| In: | 40th International Conference on Electron-, Ion- and Photon-beam Technology and Nanofabrication 1996, Atlanta, GA, USA, 28 - 31 May 1996, pp.3947-3950 |
| Subject category | Accelerators and Storage Rings |
レコード 生成： 1996-08-13, 最終変更： 2019-02-26
TIF