| Preprint | |
| Report number | LBL-35962 |
| Title | Characterization and control of wafer charging effects during high-current ion implantation |
| Author(s) | Current, M I ; Lukaszek, W ; Dixon, W ; Vella, M C ; Messick, C ; Shideler, J ; Reno, S |
| Publication | 1994 |
| Imprint | Feb 1994 |
| Number of pages | 16 |
| Subject category | Engineering |
Rekord stworzony 1995-03-02, ostatnia modyfikacja 2015-05-20
TIF