| Article | |
| Title | Influence Of Energy Contamination At S/D-Extension Dopant Implantation Using Ultra Fast Annealing |
| Author(s) | Herden, Marc ; Gehre, Daniel ; Feudel, Thomas ; Herrmann, Lutz |
| Publication | 2006 |
| In: | AIP Conf. Proc. 866 (2006) pp.13-16 |
| In: | 16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.13-16 |
Record created 2007-03-14, last modified 2008-01-31
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Published version from AIP
Published version from AIP