Showing 1–50 of 53 results for author: Steeneken, P G

Finite Element-based Nonlinear Dynamic Optimization of Nanomechanical Resonators

Authors: Zichao Li, Farbod Alijani, Ali Sarafraz, Minxing Xu, Richard A. Norte, Alejandro M. Aragon, Peter G. Steeneken

Abstract: Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here,… ▽ More Nonlinear dynamic simulations of mechanical resonators have been facilitated by the advent of computational techniques that generate nonlinear reduced order models (ROMs) using the finite element (FE) method. However, designing devices with specific nonlinear characteristics remains inefficient since it requires manual adjustment of the design parameters and can result in suboptimal designs. Here, we integrate an FE-based nonlinear ROM technique with a derivative-free optimization algorithm to enable the design of nonlinear mechanical resonators. The resulting methodology is used to optimize the support design of high-stress nanomechanical Si3N4 string resonators, in the presence of conflicting objectives such as simultaneous enhancement of Q-factor and nonlinear Duffing constant. To that end, we generate Pareto frontiers that highlight the trade-offs between optimization objectives and validate the results both numerically and experimentally. To further demonstrate the capability of multi-objective optimization for practical design challenges, we simultaneously optimize the design of nanoresonators for three key figure-of-merits in resonant sensing: power consumption, sensitivity and response time. The presented methodology can facilitate and accelerate designing (nano)mechanical resonators with optimized performance for a wide variety of applications. △ Less

Submitted 17 July, 2024; originally announced July 2024.

The graphene squeeze-film microphone

Authors: M. P. Abrahams, J. Martinez, P. G. Steeneken, G. J. Verbiest

Abstract: Most microphones operate by detecting the sound-pressure induced motion of a membrane. In contrast, here we introduce a microphone that operates by monitoring the sound-pressure-induced modulation of the compressibility of air. By driving a graphene membrane at its resonance frequency, the gas, that is trapped in a squeeze-film beneath it, is compressed at high frequency. Since the stiffness of th… ▽ More Most microphones operate by detecting the sound-pressure induced motion of a membrane. In contrast, here we introduce a microphone that operates by monitoring the sound-pressure-induced modulation of the compressibility of air. By driving a graphene membrane at its resonance frequency, the gas, that is trapped in a squeeze-film beneath it, is compressed at high frequency. Since the stiffness of the gas film depend on the air pressure, the resonance frequency of the graphene is modulated by variations in sound pressure. We demonstrate that this squeeze-film microphone principle can be used to detect sound and music by tracking the membrane's resonance frequency using a phase-locked loop (PLL). Since the sound detection principle is different from conventional devices, the squeeze-film microphone potentially offers advantages like increased dynamic range, and a lower susceptibility to pressure-induced failure and vibration-induced noise. Moreover, it might be made much smaller, as demonstrated by the microphone in this work that operates using a circular graphene membrane with an area that is more than a factor 1000 smaller than that of MEMS microphones. △ Less

Submitted 13 June, 2024; originally announced June 2024.

Comments: 9 pages, 6 figures

Tuning dissipation dilution in 2D material resonators by MEMS-induced tension

Authors: M. P. F. Wopereis, N. Bouman, S. Dutta, P. G. Steeneken, F. Alijani, G. J. Verbiest

Abstract: Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical sensors is currently limited by their low quality ($Q$)-factor. Here, we make use of micro-electromechanical systems (MEMS) to apply pure in-plane mechanical str… ▽ More Resonators based on two-dimensional (2D) materials have exceptional properties for application as nanomechanical sensors, which allows them to operate at high frequencies with high sensitivity. However, their performance as nanomechanical sensors is currently limited by their low quality ($Q$)-factor. Here, we make use of micro-electromechanical systems (MEMS) to apply pure in-plane mechanical strain, enhancing both their resonance frequency and Q-factor. In contrast to earlier work, the 2D material resonators are fabricated on the MEMS actuators without any wet processing steps, using a dry-transfer method. A platinum clamp, that is deposited by electron beam-induced deposition, is shown to be effective in fixing the 2D membrane to the MEMS and preventing slippage. By in-plane straining the membranes in a purely mechanical fashion, we increase the tensile energy, thereby diluting dissipation. This way, we show how dissipation dilution can increase the $Q$-factor of 2D material resonators by 91\%. The presented MEMS actuated dissipation dilution method does not only pave the way towards higher $Q$-factors in resonators based on 2D materials, but also provides a route toward studies of the intrinsic loss mechanisms of 2D materials in the monolayer limit. △ Less

Submitted 1 March, 2024; v1 submitted 13 January, 2024; originally announced January 2024.

Comments: 20 pages, 15 figures

Optomechanical methodology for characterizing the thermal properties of 2D materials

Authors: Hanqing Liu, Hatem Brahmi, Carla Boix-Constant, Herre S. J. van der Zant, Peter G. Steeneken, Gerard J. Verbiest

Abstract: Heat transport in two-dimensions is fundamentally different from that in three dimensions. As a consequence, the thermal properties of 2D materials are of great interest, both from scientific and application point of view. However, few techniques are available for accurate determination of these properties in ultrathin suspended membranes. Here, we present an optomechanical methodology for extract… ▽ More Heat transport in two-dimensions is fundamentally different from that in three dimensions. As a consequence, the thermal properties of 2D materials are of great interest, both from scientific and application point of view. However, few techniques are available for accurate determination of these properties in ultrathin suspended membranes. Here, we present an optomechanical methodology for extracting the thermal expansion coefficient, specific heat and thermal conductivity of ultrathin membranes made of 2H-TaS2, FePS3, polycrystalline silicon, MoS2 and WSe2. The obtained thermal properties are in good agreement with values reported in the literature for the same materials. Our work provides an optomechanical method for determining thermal properties of ultrathin suspended membranes, that are difficult to measure otherwise. It can does provide a route towards improving our understanding of heat transport in the 2D limit and facilitates engineering of 2D structures with dedicated thermal performance. △ Less

Submitted 10 December, 2023; originally announced December 2023.

Comments: 14 pages, 10 figures

Nonlinear dynamics and magneto-elasticity of nanodrums near the phase transition

Authors: Makars Šiškins, Ata Keşkekler, Maurits J. A. Houmes, Samuel Mañas-Valero, Eugenio Coronado, Yaroslav M. Blanter, Herre S. J. van der Zant, Peter G. Steeneken, Farbod Alijani

Abstract: Nanomechanical resonances of two-dimensional (2D) materials are sensitive probes for condensed-matter physics, offering new insights into magnetic and electronic phase transitions. Despite extensive research, the influence of the spin dynamics near a second-order phase transition on the nonlinear dynamics of 2D membranes has remained largely unexplored. Here, we investigate nonlinear magneto-mecha… ▽ More Nanomechanical resonances of two-dimensional (2D) materials are sensitive probes for condensed-matter physics, offering new insights into magnetic and electronic phase transitions. Despite extensive research, the influence of the spin dynamics near a second-order phase transition on the nonlinear dynamics of 2D membranes has remained largely unexplored. Here, we investigate nonlinear magneto-mechanical coupling to antiferromagnetic order in suspended FePS$_3$-based heterostructure membranes. By monitoring the motion of these membranes as a function of temperature, we observe characteristic features in both nonlinear stiffness and damping close to the Néel temperature $T_{\rm{N}}$. We account for these experimental observations with an analytical magnetostriction model in which these nonlinearities emerge from a coupling between mechanical and magnetic oscillations, demonstrating that magneto-elasticity can lead to nonlinear damping. Our findings thus provide insights into the thermodynamics and magneto-mechanical energy dissipation mechanisms in nanomechanical resonators due to the material's phase change and magnetic order relaxation. △ Less

Submitted 18 September, 2023; originally announced September 2023.

Centimeter-scale nanomechanical resonators with low dissipation

Authors: Andrea Cupertino, Dongil Shin, Leo Guo, Peter G. Steeneken, Miguel A. Bessa, Richard A. Norte

Abstract: High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet re… ▽ More High-aspect-ratio mechanical resonators are pivotal in precision sensing, from macroscopic gravitational wave detectors to nanoscale acoustics. However, fabrication challenges and high computational costs have limited the length-to-thickness ratio of these devices, leaving a largely unexplored regime in nano-engineering. We present nanomechanical resonators that extend centimeters in length yet retain nanometer thickness. We explore this expanded design space using an optimization approach which judiciously employs fast millimeter-scale simulations to steer the more computationally intensive centimeter-scale design optimization. By employing delicate nanofabrication techniques, our approach ensures high-yield realization, experimentally confirming room-temperature quality factors close to theoretical predictions. The synergy between nanofabrication, design optimization guided by machine learning, and precision engineering opens a solid-state path to room-temperature quality factors approaching 10 billion at kilohertz mechanical frequencies -- comparable to the performance of leading cryogenic resonators and levitated nanospheres, even under significantly less stringent temperature and vacuum conditions. △ Less

Submitted 14 June, 2024; v1 submitted 31 July, 2023; originally announced August 2023.

Enhanced sensitivity and tunability of thermomechanical resonance near the buckling bifurcation

Authors: Hanqing Liu, Gabriele Baglioni, Carla B. Constant, Herre S. J. van der Zant, Peter G. Steeneken, Gerard J. Verbiest

Abstract: The high susceptibility of ultrathin two-dimensional (2D) material resonators to force and temperature makes them ideal systems for sensing applications and exploring thermomechanical coupling. Although the dynamics of these systems at high stress has been thoroughly investigated, their behavior near the buckling transition has received less attention. Here, we demonstrate that the force sensitivi… ▽ More The high susceptibility of ultrathin two-dimensional (2D) material resonators to force and temperature makes them ideal systems for sensing applications and exploring thermomechanical coupling. Although the dynamics of these systems at high stress has been thoroughly investigated, their behavior near the buckling transition has received less attention. Here, we demonstrate that the force sensitivity and frequency tunability of 2D material resonators are significantly enhanced near the buckling bifurcation. This bifurcation is triggered by compressive displacement that we induce via thermal expansion of the devices, while measuring their dynamics via an optomechanical technique. We understand the frequency tuning of the devices through a mechanical buckling model, which allows to extract the central deflection and boundary compressive displacement of the membrane. Surprisingly, we obtain a remarkable enhancement of up to 14x the vibration amplitude attributed to a very low stiffness of the membrane at the buckling transition, as well as a high frequency tunability by temperature of more than 4.02 %/K. The presented results provide insights into the effects of buckling on the dynamics of free-standing 2D materials and thereby open up opportunities for the realization of 2D resonant sensors with buckling-enhanced sensitivity. △ Less

Submitted 7 December, 2023; v1 submitted 1 May, 2023; originally announced May 2023.

Comments: 20 pages and 4 figures

Characterizing multi-mode nonlinear dynamics of nanomechanical resonators

Authors: Ata Keşkekler, Vincent Bos, Alejandro M. Aragón, Peter G. Steeneken, Farbod Alijani

Abstract: Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear effects, it is shown that these models quickly deviate from experimental findings when multiple modes influence the nonlinear response. Here, we present a nonline… ▽ More Mechanical nonlinearities dominate the motion of nanoresonators already at relatively small oscillation amplitudes. Although single and coupled two-degrees-of-freedom models have been used to account for experimentally observed nonlinear effects, it is shown that these models quickly deviate from experimental findings when multiple modes influence the nonlinear response. Here, we present a nonlinear reduced-order modelling methodology based on FEM simulations for capturing the global nonlinear dynamics of nanomechanical resonators. Our physics-based approach obtains the quadratic and cubic nonlinearities of resonators over a wide frequency range that spans 70 MHz. To qualitatively validate our approach, we perform experiments on a graphene nanodrum driven opto-thermally and show that the model can replicate diverse ranges of nonlinear phenomena, including multi-stability, parametric resonance, and different internal resonances without considering any empirical nonlinear fitting parameters. By providing a direct link between microscopic geometry, material parameters, and nonlinear dynamic response, we clarify the physical significance of nonlinear parameters that are obtained from fitting the dynamics of nanomechanical systems, and provide a route for designing devices with desired nonlinear behaviour. △ Less

Submitted 3 April, 2023; originally announced April 2023.

Magnetic order in 2D antiferromagnets revealed by spontaneous anisotropic magnetostriction

Authors: Maurits J. A. Houmes, Gabriele Baglioni, Makars Šiškins, Martin Lee, Dorye L. Esteras, Alberto M. Ruiz, Samuel Mañas-Valero, Carla Boix-Constant, Jose J. Baldoví, Eugenio Coronado, Yaroslav M. Blanter, Peter G. Steeneken, Herre S. J. van der Zant

Abstract: The temperature dependent order parameter provides important information on the nature of magnetism. Using traditional methods to study this parameter in two-dimensional (2D) magnets remains difficult, however, particularly for insulating antiferromagnetic (AF) compounds. Here, we show that its temperature dependence in AF MPS$_{3}$ (M(II) = Fe, Co, Ni) can be probed via the anisotropy in the reso… ▽ More The temperature dependent order parameter provides important information on the nature of magnetism. Using traditional methods to study this parameter in two-dimensional (2D) magnets remains difficult, however, particularly for insulating antiferromagnetic (AF) compounds. Here, we show that its temperature dependence in AF MPS$_{3}$ (M(II) = Fe, Co, Ni) can be probed via the anisotropy in the resonance frequency of rectangular membranes, mediated by a combination of anisotropic magnetostriction and spontaneous staggered magnetization. Density functional calculations followed by a derived orbital-resolved magnetic exchange analysis confirm and unravel the microscopic origin of this magnetization inducing anistropic strain. We further show that the temperature and thickness dependent order parameter allows to deduce the material's critical exponents characterising magnetic order. Nanomechanical sensing of magnetic order thus provides a future platform to investigate 2D magnetism down to the single-layer limit. △ Less

Submitted 24 April, 2023; v1 submitted 20 March, 2023; originally announced March 2023.

Comments: 9 pages, 4 figures, 1 table. Appended SI

Beating ringdowns of near-degenerate mechanical resonances

Authors: Matthijs H. J. de Jong, Andrea Cupertino, Dongil Shin, Simon Gröblacher, Farbod Alijani, Peter G. Steeneken, Richard A. Norte

Abstract: Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here, we show coupling between high Q-factor ($>\!\!10^4$) resonances with a nearly 1:1 frequency relation in spatially-symmetric microresonators. We develop and demonstrate a method to analyze their… ▽ More Mechanical resonators that possess coupled modes with harmonic frequency relations have recently sparked interest due to their suitability for controllable energy transfer and non-Hermitian dynamics. Here, we show coupling between high Q-factor ($>\!\!10^4$) resonances with a nearly 1:1 frequency relation in spatially-symmetric microresonators. We develop and demonstrate a method to analyze their dynamical behavior based on the simultaneous and resonant detection of both spectral peaks, and validate this with experimental results. The frequency difference between the peaks modulates their ringdown, and creates a beat pattern in the linear decay. This method applies both to the externally driven and the Brownian motion (thermal) regime, and allows characterization of both linear and nonlinear parameters. The mechanism behind this method renders it broadly applicable to both optical and electrical readout, as well as to different mechanical systems. This will aid studies using near-degenerate mechanical modes, for e.g., optomechanical energy transfer, synchronization and gyroscopic sensors. △ Less

Submitted 25 August, 2023; v1 submitted 17 November, 2022; originally announced November 2022.

Journal ref: Physical Review Applied 20, 024053 (2023)

Mechanical dissipation by substrate-mode coupling in SiN resonators

Authors: Matthijs H. J. de Jong, Malte A. ten Wolde, Andrea Cupertino, Simon Gröblacher, Peter G. Steeneken, Richard A. Norte

Abstract: State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance of high-Q… ▽ More State-of-the-art nanomechanical resonators are heralded as a central component for next-generation clocks, filters, resonant sensors and quantum technologies. To practically build these technologies will require monolithic integration of microchips, resonators and readout systems. While it is widely seen that mounting microchip substrates into a system can greatly impact the performance of high-Q resonators, a systematic study has remained elusive, owing to the variety of physical processes and factors that influence the dissipation. Here, we analytically analyze a mechanism by which substrates couple to resonators manufactured on them, and experimentally demonstrate that this coupling can increase the mechanical dissipation of nanomechanical resonators when the resonance frequencies of resonator and substrate coincide. More generally, we then show a similar coupling mechanism can exist between two adjacent resonators. Since the substrate-mode coupling mechanism strongly depends on both the resonator position on the substrate and the mounting of the substrate, this work provides key design guidelines for high-precision nanomechanical technologies. △ Less

Submitted 26 July, 2022; v1 submitted 2 June, 2022; originally announced June 2022.

Journal ref: Applied Physics Letters 121, 032201 (2022)

Tension tuning of sound and heat transport in graphene

Authors: H. Liu, M. Lee, M. Šiškins, H. S. J. van der Zant, P. G. Steeneken, G. J. Verbiest

Abstract: Heat transport by acoustic phonons in 2D materials is fundamentally different from that in 3D crystals because the out-of-plane phonons propagate in a unique way that strongly depends on tension and bending rigidity. Since in-plane and out-of-plane phonon baths are decoupled, initial studies suggested they provide independent pathways for heat transport and storage in 2D materials. Here, we induce… ▽ More Heat transport by acoustic phonons in 2D materials is fundamentally different from that in 3D crystals because the out-of-plane phonons propagate in a unique way that strongly depends on tension and bending rigidity. Since in-plane and out-of-plane phonon baths are decoupled, initial studies suggested they provide independent pathways for heat transport and storage in 2D materials. Here, we induce tension in freestanding graphene membranes by electrostatic force, and use optomechanical techniques to demonstrate that it can change the rate of heat transport by as much as 33%. Using a ballistic Debye model, we account for these observations and extract the average bending rigidity of the flexural acoustic phonons, which increases approximately linearly with the membrane's areal mass density, in contrast to the cubic dependence seen in bulk structures. Thus, we not only elucidate phononic heat transport mechanisms in suspended 2D materials, but also provide a promising route for controlling nanoscale heat transport by tension. △ Less

Submitted 14 April, 2022; originally announced April 2022.

Comments: 34 pages, 10 figures

Symmetry-breaking induced frequency combs in graphene resonators

Authors: Ata Keşkekler, Hadi Arjmandi, Peter G. Steeneken, Farbod Alijani

Abstract: Nonlinearities are inherent to the dynamics of two-dimensional materials. Phenomena like intermodal coupling already arise at amplitudes of only a few nanometers, and a range of unexplored effects still awaits to be harnessed. Here, we demonstrate a route for generating mechanical frequency combs in graphene resonators undergoing symmetry-breaking forces. We use electrostatic force to break the me… ▽ More Nonlinearities are inherent to the dynamics of two-dimensional materials. Phenomena like intermodal coupling already arise at amplitudes of only a few nanometers, and a range of unexplored effects still awaits to be harnessed. Here, we demonstrate a route for generating mechanical frequency combs in graphene resonators undergoing symmetry-breaking forces. We use electrostatic force to break the membrane's out-of-plane symmetry and tune its resonance frequency towards a two-to-one internal resonance, thus achieving strong coupling between two of its mechanical modes. When increasing the drive level, we observe splitting of the fundamental resonance peak, followed by the emergence of a frequency comb regime. We attribute the observed physics to a non-symmetric restoring potential, and show that the frequency comb regime is mediated by a Neimark bifurcation of the periodic solution. These results demonstrate that mechanical frequency combs and chaotic dynamics in 2D material resonators can emerge near internal resonances due to symmetry-breaking. △ Less

Submitted 7 February, 2022; originally announced February 2022.

Self-sealing complex oxide resonators

Authors: Martin Lee, Martin Robin, Ruben Guis, Ulderico Filippozzi, Dong Hoon Shin, Thierry C. van Thiel, Stijn Paardekooper, Johannes R. Renshof, Herre S. J. van der Zant, Andrea D. Caviglia, Gerard J. Verbiest, Peter G. Steeneken

Abstract: Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressu… ▽ More Although 2D materials hold great potential for next-generation pressure sensors, recent studies revealed that gases permeate along the membrane-surface interface that is only weakly bound by van der Waals interactions, necessitating additional sealing procedures. In this work, we demonstrate the use of free-standing complex oxides as self-sealing membranes that allow the reference cavity of pressure sensors to be sealed by a simple anneal. To test the hermeticity, we study the gas permeation time constants in nano-mechanical resonators made from SrRuO3 and SrTiO3 membranes suspended over SiO2/Si cavities which show an improvement up to 4 orders of magnitude in the permeation time constant after annealing the devices for 15 minutes. Similar devices fabricated on Si3N4/Si do not show such improvements, suggesting that the adhesion increase over SiO2 is mediated by oxygen bonds that are formed at the SiO2/complex oxide interface during the self-sealing anneal. We confirm the enhancement of adhesion by picosecond ultrasonics measurements which show an increase in the interfacial stiffness by 70% after annealing. Since it is straigthforward to apply, the presented self-sealing method is thus a promising route toward realizing ultrathin hermetic pressure sensors. △ Less

Submitted 8 September, 2021; originally announced September 2021.

Comments: 7 pages, 5 figures

Spiderweb nanomechanical resonators via Bayesian optimization: inspired by nature and guided by machine learning

Authors: Dongil Shin, Andrea Cupertino, Matthijs H. J. de Jong, Peter G. Steeneken, Miguel A. Bessa, Richard A. Norte

Abstract: From ultra-sensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. Howev… ▽ More From ultra-sensitive detectors of fundamental forces to quantum networks and sensors, mechanical resonators are enabling next-generation technologies to operate in room temperature environments. Currently, silicon nitride nanoresonators stand as a leading microchip platform in these advances by allowing for mechanical resonators whose motion is remarkably isolated from ambient thermal noise. However, to date, human intuition has remained the driving force behind design processes. Here, inspired by nature and guided by machine learning, a spiderweb nanomechanical resonator is developed that exhibits vibration modes which are isolated from ambient thermal environments via a novel "torsional soft-clamping" mechanism discovered by the data-driven optimization algorithm. This bio-inspired resonator is then fabricated; experimentally confirming a new paradigm in mechanics with quality factors above 1 billion in room temperature environments. In contrast to other state-of-the-art resonators, this milestone is achieved with a compact design which does not require sub-micron lithographic features or complex phononic bandgaps, making it significantly easier and cheaper to manufacture at large scales. Here we demonstrate the ability of machine learning to work in tandem with human intuition to augment creative possibilities and uncover new strategies in computing and nanotechnology. △ Less

Submitted 13 December, 2021; v1 submitted 10 August, 2021; originally announced August 2021.

Journal ref: Shin, D., Cupertino, A., de, M. H. J., Steeneken, P. G., Bessa, M. A., Norte, R. A., Spiderweb Nanomechanical Resonators via Bayesian Optimization: Inspired by Nature and Guided by Machine Learning. Adv. Mater. 2021, 2106248

Chemical design and magnetic ordering in thin layers of 2D MOFs

Authors: Javier López-Cabrelles, Samuel Mañas-Valero, Iñigo J. Vitórica-Yrezábal, Makars Šiškins, Martin Lee, Peter G. Steeneken, Herre S. J. van der Zant, Guillermo Mínguez Espallargas, Eugenio Coronado

Abstract: Through rational chemical design, and thanks to the hybrid nature of metal-organic frameworks (MOFs), it is possible to prepare molecule-based 2D magnetic materials stable at ambient conditions. Here, we illustrate the versatility of this approach by changing both the metallic nodes and the ligands in a family of layered MOFs that allows the tuning of their magnetic properties. Specifically, the r… ▽ More Through rational chemical design, and thanks to the hybrid nature of metal-organic frameworks (MOFs), it is possible to prepare molecule-based 2D magnetic materials stable at ambient conditions. Here, we illustrate the versatility of this approach by changing both the metallic nodes and the ligands in a family of layered MOFs that allows the tuning of their magnetic properties. Specifically, the reaction of benzimidazole-type ligands with different metal centres (MII = Fe, Co, Mn, Zn) in a solvent-free synthesis produces a family of crystalline materials, denoted as MUV-1(M), which order antiferromagnetically with critical temperatures that depend on M. Furthermore, the incorporation of additional substituents in the ligand results in a novel system, denoted as MUV-8, formed by covalently bound magnetic double-layers interconnected by van der Waals interactions, a topology that is very rare in the field of 2D materials and unprecedented for 2D magnets. These layered materials are robust enough to be mechanically exfoliated down to a few layers with large lateral dimensions. Finally, the robustness and crystallinity of these layered MOFs allow the fabrication of nanomechanical resonators that can be used to detect -- through laser interferometry -- the magnetic order in thin layers of these 2D molecule-based antiferromagnets. △ Less

Submitted 24 July, 2021; originally announced July 2021.

Comments: Main Text + Supplementary Information

Report number: Journal of the American Chemical Society 2021, 143, 44, 18502--18510

Journal ref: Journal of the American Chemical Society 143, 44, 18502 (2021)

Tunable strong coupling of mechanical resonance between spatially separated FePS$_3$ nanodrums

Authors: Makars Šiškins, Ekaterina Sokolovskaya, Martin Lee, Samuel Mañas-Valero, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these types of systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS$_3$. We describe a tunable electromechanical mechanism for control over both t… ▽ More Coupled nanomechanical resonators made of two-dimensional materials are promising for processing information with mechanical modes. However, the challenge for these types of systems is to control the coupling. Here, we demonstrate strong coupling of motion between two suspended membranes of the magnetic 2D material FePS$_3$. We describe a tunable electromechanical mechanism for control over both the resonance frequency and the coupling strength using a gate voltage electrode under each membrane. We show that the coupling can be utilized for transferring data from one drum to the other by amplitude modulation. Finally, we also study the temperature dependence of the coupling, and in particular how it is affected by the antiferromagnetic phase transition characteristic of this material. The presented electrical coupling of resonant magnetic 2D membranes holds promise of transferring mechanical energy over a distance at low electrical power, thus enabling novel data readout and information processing technologies. △ Less

Submitted 2 July, 2021; originally announced July 2021.

Squeeze-film effect on atomically thin resonators in the high-pressure limit

Authors: Robin J. Dolleman, Debadi Chakraborty, Daniel R. Ladiges, Herre S. J. van der Zant, John E. Sader, Peter G. Steeneken

Abstract: The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure sensing applications. Here, we study the squeeze-film effect in singl… ▽ More The resonance frequency of membranes depends on the gas pressure due to the squeeze-film effect, induced by the compression of a thin gas film that is trapped underneath the resonator by the high frequency motion. This effect is particularly large in low-mass graphene membranes, which makes them promising candidates for pressure sensing applications. Here, we study the squeeze-film effect in single layer graphene resonators and find that their resonance frequency is lower than expected from models assuming ideal compression. To understand this deviation, we perform Boltzmann and continuum finite-element simulations, and propose an improved model that includes the effects of gas leakage and can account for the observed pressure dependence of the resonance frequency. Thus, this work provides further understanding of the squeeze-film effect and provides further directions into optimizing the design of squeeze-film pressure sensors from 2D materials. △ Less

Submitted 17 June, 2021; originally announced June 2021.

Dynamics of 2D Material Membranes

Authors: Peter G. Steeneken, Robin J. Dolleman, Dejan Davidovikj, Farbod Alijani, Herre S. J. van der Zant

Abstract: The dynamics of suspended two-dimensional (2D) materials has received increasing attention during the last decade, yielding new techniques to study and interpret the physics that governs the motion of atomically thin layers. This has led to insights into the role of thermodynamic and nonlinear effects as well as the mechanisms that govern dissipation and stiffness in these resonators. In this revi… ▽ More The dynamics of suspended two-dimensional (2D) materials has received increasing attention during the last decade, yielding new techniques to study and interpret the physics that governs the motion of atomically thin layers. This has led to insights into the role of thermodynamic and nonlinear effects as well as the mechanisms that govern dissipation and stiffness in these resonators. In this review, we present the current state-of-the-art in the experimental study of the dynamics of 2D membranes. The focus will be both on the experimental measurement techniques and on the interpretation of the physical phenomena exhibited by atomically thin membranes in the linear and nonlinear regimes. We will show that resonant 2D membranes have emerged both as sensitive probes of condensed matter physics in ultrathin layers, and as sensitive elements to monitor small external forces or other changes in the environment. New directions for utilizing suspended 2D membranes for material characterization, thermal transport, and gas interactions will be discussed and we conclude by outlining the challenges and opportunities in this upcoming field. △ Less

Submitted 16 May, 2021; originally announced May 2021.

Comments: 39 pages, 16 figures

Journal ref: 2D Mater. 8 042001 (2021)

Study of charge density waves in suspended 2H-TaS2 and 2H-TaSe2 by nanomechanical resonance

Authors: Martin Lee, Makars Šiškins, Samuel Mañas-Valero, Eugenio Coronado, Peter G. Steeneken, Herre S. J. van der Zant

Abstract: The charge density wave (CDW) state in van der Waals systems shows interesting scaling phenomena as the number of layers can significantly affect the CDW transition temperature, $T_{CDW}$. However, it is often difficult to use conventional methods to study the phase transition in these systems due to their small size and sensitivity to degradation. Degradation is an important parameter which has b… ▽ More The charge density wave (CDW) state in van der Waals systems shows interesting scaling phenomena as the number of layers can significantly affect the CDW transition temperature, $T_{CDW}$. However, it is often difficult to use conventional methods to study the phase transition in these systems due to their small size and sensitivity to degradation. Degradation is an important parameter which has been shown to greatly influence the superconductivity in layered systems. Since the CDW state competes with the onset of superconductivity, it is expected that $T_{CDW}$ will also be affected by the degradation. Here, we probe the CDW phase transition by the mechanical resonances of suspended 2H-TaS2 and 2H-TaSe2 membranes and study the effect of disorder on the CDW state. Pristine flakes show the transition near the reported values of 75 K and 122 K respectively. We then study the effect of degradation on 2H-TaS2 which displays an enhancement of $T_{CDW}$ up to 129 K after degradation in ambient air. Finally, we study a sample with local degradation and observe that multiple phase transitions occur at 87 K, 103 K and 118 K with a hysteresis in temperature in the same membrane. The observed spatial variations in the Raman spectra suggest that variations in crystal structure cause domains with different transition temperatures which could result in the hysteresis. This work shows the potential of using nanomechanical resonance to characterize the CDW in suspended 2D materials and demonstrate that degradation can have a large effect on transition temperatures. △ Less

Submitted 3 May, 2021; originally announced May 2021.

Comments: The following article has been accepted by Applied Physics Letters. After it is published, it will be found at [https://doi.org/10.1063/5.0051112]

Nanomechanical probing and strain tuning of the Curie temperature in suspended Cr$_2$Ge$_2$Te$_6$ heterostructures

Authors: Makars Šiškins, Samer Kurdi, Martin Lee, Benjamin J. M. Slotboom, Wenyu Xing, Samuel Mañas-Valero, Eugenio Coronado, Shuang Jia, Wei Han, Toeno van der Sar, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Two-dimensional (2D) magnetic materials with strong magnetostriction are interesting systems for strain-tuning the magnetization, enabling potential for realizing spintronic and nanomagnetic devices. Realizing this potential requires understanding of the magneto-mechanical coupling in the 2D limit. In this work, we suspend thin Cr$_2$Ge$_2$Te$_6$ layers, creating nanomechanical membrane resonators… ▽ More Two-dimensional (2D) magnetic materials with strong magnetostriction are interesting systems for strain-tuning the magnetization, enabling potential for realizing spintronic and nanomagnetic devices. Realizing this potential requires understanding of the magneto-mechanical coupling in the 2D limit. In this work, we suspend thin Cr$_2$Ge$_2$Te$_6$ layers, creating nanomechanical membrane resonators. We probe its mechanical and magnetic properties as a function of temperature and strain. Pronounced signatures of magneto-elastic coupling are observed in the temperature-dependent resonance frequency of these membranes near $T_{\rm C}$. We further utilize Cr$_2$Ge$_2$Te$_6$ in heterostructures with thin layers of WSe$_2$ and FePS$_3$, which have positive thermal expansion coefficients, to compensate the negative thermal expansion coefficient of Cr$_2$Ge$_2$Te$_6$ and quantitatively probe the corresponding $T_{\rm C}$. Finally, we induce a strain of $0.016\%$ in a suspended heterostructure via electrostatic force and demonstrate a resulting enhancement of $T_{\rm C}$ by $2.5 \pm 0.6$ K in the absence of an external magnetic field. △ Less

Submitted 9 November, 2021; v1 submitted 19 April, 2021; originally announced April 2021.

Controlling the anisotropy of a van der Waals antiferromagnet with light

Authors: D. Afanasiev, J. R. Hortensius, M. Matthiesen, S. Mañas-Valero, M. Šiškins, M. Lee, E. Lesne, H. S. J. van der Zant, P. G. Steeneken, B. A. Ivanov, E. Coronado, A. D. Caviglia

Abstract: Magnetic van der Waals materials provide an ideal playground for exploring the fundamentals of low-dimensional magnetism and open new opportunities for ultrathin spin processing devices. The Mermin-Wagner theorem dictates that as in reduced dimensions isotropic spin interactions cannot retain long-range correlations; the order is stabilized by magnetic anisotropy. Here, using ultrashort pulses of… ▽ More Magnetic van der Waals materials provide an ideal playground for exploring the fundamentals of low-dimensional magnetism and open new opportunities for ultrathin spin processing devices. The Mermin-Wagner theorem dictates that as in reduced dimensions isotropic spin interactions cannot retain long-range correlations; the order is stabilized by magnetic anisotropy. Here, using ultrashort pulses of light, we demonstrate all-optical control of magnetic anisotropy in the two-dimensional van der Waals antiferromagnet NiPS$_3$. Tuning the photon energy in resonance with an orbital transition between crystal-field split levels of the nickel ions, we demonstrate the selective activation of a sub-THz two-dimensional magnon mode. The pump polarization control of the magnon amplitude confirms that the activation is governed by the instantaneous magnetic anisotropy axis emergent in response to photoexcitation of orbital states with a lowered symmetry. Our results establish pumping of orbital resonances as a universal route for manipulating magnetic order in low-dimensional (anti)ferromagnets. △ Less

Submitted 10 October, 2020; originally announced October 2020.

Journal ref: Science Advances Vol. 7, no. 23, eabf3096 (2021)

Semi-permeability of graphene nanodrums in sucrose solution

Authors: Robin J. Dolleman, Allard J. Katan, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Semi-permeable membranes are important elements in water purification and energy generation applications, for which the atomic thickness and strength of graphene can enhance efficiency and permeation rate while maintaining good selectivity. Here, we show that an osmotic pressure difference forms across a suspended graphene membrane as a response to a sucrose concentration difference, providing evi… ▽ More Semi-permeable membranes are important elements in water purification and energy generation applications, for which the atomic thickness and strength of graphene can enhance efficiency and permeation rate while maintaining good selectivity. Here, we show that an osmotic pressure difference forms across a suspended graphene membrane as a response to a sucrose concentration difference, providing evidence for its semi-permeability. This osmotic pressure difference is detected via the deflection of the graphene membrane that is measured by atomic force microscopy. Using this technique, the time dependence of this deflection allows us to measure the water permeation rate of a single 3.4 $μ$m diameter graphene membrane. Its value is close to the expected value of a single nanopore in graphene. The method thus allows one to experimentally study the semi-permeability of graphene membranes at the microscale when the leakage rate is miniscule. It can therefore find use in the development of graphene membranes for filtration, and can enable sensors that measure the concentration and composition of solutions. △ Less

Submitted 8 September, 2020; originally announced September 2020.

Nanoelectromechanical Sensors based on Suspended 2D Materials

Authors: Max C. Lemme, Stefan Wagner, Kangho Lee, Xuge Fan, Gerard J. Verbiest, Sebastian Wittmann, Sebastian Lukas, Robin J. Dolleman, Frank Niklaus, Herre S. J. van der Zant, Georg S. Duesberg, Peter G. Steeneken

Abstract: The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different… ▽ More The unique properties and atomic thickness of two-dimensional (2D) materials enable smaller and better nanoelectromechanical sensors with novel functionalities. During the last decade, many studies have successfully shown the feasibility of using suspended membranes of 2D materials in pressure sensors, microphones, accelerometers, and mass and gas sensors. In this review, we explain the different sensing concepts and give an overview of the relevant material properties, fabrication routes, and device operation principles. Finally, we discuss sensor readout and integration methods and provide comparisons against the state of the art to show both the challenges and promises of 2D material-based nanoelectromechanical sensing. △ Less

Submitted 23 July, 2020; originally announced July 2020.

Comments: Review paper

Journal ref: Research, vol. 2020, Article ID 8748602

Enhancing nonlinear damping by parametric-direct internal resonance

Authors: Ata Keşkekler, Oriel Shoshani, Martin Lee, Herre S. J. van der Zant, Peter G. Steeneken, Farbod Alijani

Abstract: Mechanical sources of nonlinear damping play a central role in modern physics, from solid-state physics to thermodynamics. The microscopic theory of mechanical dissipation [M. I . Dykman, M. A. Krivoglaz, Physica Status Solidi (b) 68, 111 (1975)] suggests that nonlinear damping of a resonant mode can be strongly enhanced when it is coupled to a vibration mode that is close to twice its resonance f… ▽ More Mechanical sources of nonlinear damping play a central role in modern physics, from solid-state physics to thermodynamics. The microscopic theory of mechanical dissipation [M. I . Dykman, M. A. Krivoglaz, Physica Status Solidi (b) 68, 111 (1975)] suggests that nonlinear damping of a resonant mode can be strongly enhanced when it is coupled to a vibration mode that is close to twice its resonance frequency. To date, no experimental evidence of this enhancement has been realized. In this letter, we experimentally show that nanoresonators driven into parametric-direct internal resonance provide supporting evidence for the microscopic theory of nonlinear dissipation. By regulating the drive level, we tune the parametric resonance of a graphene nanodrum over a range of 40-70 MHz to reach successive two-to-one internal resonances, leading to a nearly two-fold increase of the nonlinear damping. Our study opens up an exciting route towards utilizing modal interactions and parametric resonance to realize resonators with engineered nonlinear dissipation over wide frequency range. △ Less

Submitted 8 July, 2020; v1 submitted 16 June, 2020; originally announced June 2020.

Sensitive capacitive pressure sensors based on graphene membrane arrays

Authors: Makars Šiškins, Martin Lee, Dominique Wehenkel, Richard van Rijn, Tijmen W. de Jong, Johannes R. Renshof, Berend C. Hopman, Willemijn S. J. M. Peters, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly… ▽ More The high flexibility, impermeability and strength of graphene membranes are key properties that can enable the next generation of nanomechanical sensors. However, for capacitive pressure sensors the sensitivity offered by a single suspended graphene membrane is too small to compete with commercial sensors. Here, we realize highly sensitive capacitive pressure sensors consisting of arrays of nearly ten thousand small, freestanding double-layer graphene membranes. We fabricate large arrays of small diameter membranes using a procedure that maintains the superior material and mechanical properties of graphene, even after high-temperature anneals. These sensors are readout using a low cost battery-powered circuit board, with a responsivity of up to 47.8 aF Pa$^{-1}$ mm$^{-2}$, thereby outperforming commercial sensors. △ Less

Submitted 19 March, 2020; originally announced March 2020.

Graphene Effusion-based Gas Sensor

Authors: Irek E. Rosłoń, Robin J. Dolleman, Hugo Licona, Martin Lee, Makars Šiškins, Henning Lebius, Lukas Madauß, Marika Schleberger, Farbod Alijani, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications because they can accommodate small pore sizes, while maintaining high permeability. These membranes are therefore receiving much attention for novel gas and water purification applications. Here we show that the atomic thickness and high resonance frequency of porous graphene membranes en… ▽ More Porous, atomically thin graphene membranes have interesting properties for filtration and sieving applications because they can accommodate small pore sizes, while maintaining high permeability. These membranes are therefore receiving much attention for novel gas and water purification applications. Here we show that the atomic thickness and high resonance frequency of porous graphene membranes enables an effusion based gas sensing method that distinguishes gases based on their molecular mass. Graphene membranes are used to pump gases through nanopores using optothermal forces. By monitoring the time delay between the actuation force and the membrane mechanical motion, the permeation time-constants of various gases are shown to be significantly different. The measured linear relation between the effusion time constant and the square root of the molecular mass provides a method for sensing gases based on their molecular mass. The presented microscopic effusion based gas sensor can provide a small, low-power alternative for large, high-power, mass-spectrometry and optical spectrometry based gas sensing methods. △ Less

Submitted 26 January, 2020; originally announced January 2020.

Comments: 12 pages

Magnetic and electronic phase transitions probed by nanomechanical resonance

Authors: Makars Šiškins, Martin Lee, Samuel Mañas-Valero, Eugenio Coronado, Yaroslav M. Blanter, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Two-dimensional (2D) materials enable new types of magnetic and electronic phases mediated by their reduced dimensionality like magic-angle induced phase transitions, 2D Ising antiferromagnets and ferromagnetism in 2D atomic layers and heterostructures. However, only a few methods are available to study these phase transitions, which for example is particularly challenging for antiferromagnetic ma… ▽ More Two-dimensional (2D) materials enable new types of magnetic and electronic phases mediated by their reduced dimensionality like magic-angle induced phase transitions, 2D Ising antiferromagnets and ferromagnetism in 2D atomic layers and heterostructures. However, only a few methods are available to study these phase transitions, which for example is particularly challenging for antiferromagnetic materials. Here, we demonstrate that these phases can be probed by the mechanical motion: the temperature dependent resonance frequency and quality factor of multilayer 2D material membranes show clear anomalies near the phase transition temperature, which are correlated to anomalies in the specific heat of the materials. The observed coupling of mechanical degrees of freedom to magnetic and electronic order is attributed to thermodynamic relations that are not restricted to van der Waals materials. Nanomechanical resonators, therefore, offer the potential to characterize phase transitions in a wide variety of materials, including those that are antiferromagnetic, insulating or so thin that conventional bulk characterization methods become unsuitable. △ Less

Submitted 19 November, 2019; originally announced November 2019.

Phonon Scattering at Kinks in Suspended Graphene

Authors: Robin J. Dolleman, Yaroslav M. Blanter, Herre S. J. van der Zant, Peter G. Steeneken, Gerard J. Verbiest

Abstract: Recent experiments have shown surprisingly large thermal time constants in suspended graphene ranging from 10 to 100 ns in drums with a diameter ranging from 2 to 7 microns. The large time constants and their scaling with diameter points towards a thermal resistance at the edge of the drum. However, an explanation of the microscopic origin of this resistance is lacking. Here, we show how phonon sc… ▽ More Recent experiments have shown surprisingly large thermal time constants in suspended graphene ranging from 10 to 100 ns in drums with a diameter ranging from 2 to 7 microns. The large time constants and their scaling with diameter points towards a thermal resistance at the edge of the drum. However, an explanation of the microscopic origin of this resistance is lacking. Here, we show how phonon scattering at a kink in the graphene, e.g. formed by sidewall adhesion at the edge of the suspended membrane, can cause a large thermal time constant. This kink strongly limits the fraction of flexural phonons that cross the suspended graphene edge, which causes a thermal interface resistance at its boundary. Our model predicts thermal time constants that are of the same order of magnitude as experimental data, and shows a similar dependence on the circumference. Furthermore, the model predicts the relative in-plane and out-of-plane phonon contributions to graphene's thermal expansion force, in agreement with experiments. We thus show, that in contrast to conventional thermal (Kapitza) resistance which occurs between two different materials, in 2D materials another type of thermal interface resistance can be geometrically induced in a single material. △ Less

Submitted 25 September, 2019; originally announced September 2019.

Journal ref: Phys. Rev. B 101, 115411 (2020)

Nonequilibrium Thermodynamics of Acoustic Phonons in Suspended Graphene

Authors: Robin J. Dolleman, Gerard J. Verbiest, Yaroslav M. Blanter, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Recent theory has predicted large temperature differences between the in-plane (LA and TA) and out-of-plane (ZA) acoustic phonon baths in locally-heated suspended graphene. To verify these predictions, and their implications for understanding the nonequilibrium thermodynamics of 2D materials, experimental techniques are needed. Here, we present a method to determine the acoustic phonon bath temper… ▽ More Recent theory has predicted large temperature differences between the in-plane (LA and TA) and out-of-plane (ZA) acoustic phonon baths in locally-heated suspended graphene. To verify these predictions, and their implications for understanding the nonequilibrium thermodynamics of 2D materials, experimental techniques are needed. Here, we present a method to determine the acoustic phonon bath temperatures from the frequency-dependent mechanical response of suspended graphene to a power modulated laser. The mechanical motion reveals two counteracting contributions to the thermal expansion force, that are attributed to fast positive thermal expansion by the in-plane phonons and slower negative thermal expansion by the out-of-plane phonons. The magnitude of the two forces reveals that the in-plane and flexural acoustic phonons are at very different temperatures in the steady-state, with typically observed values of the ratio $ΔT_{\mathrm{LA+TA}}/ΔT_{\mathrm{ZA}}$ between 0.2 and 3.7. These deviations from the generally used local thermal equilibrium assumption ($ΔT_{\mathrm{LA+TA}}=ΔT_{\mathrm{ZA}}$) can affect the experimental analysis of thermal properties of 2D materials. △ Less

Submitted 25 September, 2019; originally announced September 2019.

Journal ref: Phys. Rev. Research 2, 012058 (2020)

Ultrathin complex oxide nanomechanical resonators

Authors: Dejan Davidovikj, Dirk J. Groenendijk, Ana Mafalda R. V. L. Monteiro, Andrew Dijkhoff, Dmytro Afanasiev, Herre S. J. van der Zant, Yingkai Huang, Erik van Heumen, Andrea D. Caviglia, Peter G. Steeneken

Abstract: Complex oxide thin films and heterostructures exhibit a profusion of exotic phenomena, often resulting from the intricate interplay between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we create ultrathin membranes of strongly c… ▽ More Complex oxide thin films and heterostructures exhibit a profusion of exotic phenomena, often resulting from the intricate interplay between film and substrate. Recently it has become possible to isolate epitaxially grown single-crystalline layers of these materials, enabling the study of their properties in the absence of interface effects. In this work, we create ultrathin membranes of strongly correlated materials and demonstrate top-down fabrication of nanomechanical resonators made out of \ce{SrTiO3} and \ce{SrRuO3}. Using laser interferometry, we successfully actuate and measure the motion of the nanodrum resonators. By measuring their temperature-dependent mechanical response, we observe signatures of structural phase transitions in \ce{SrTiO3}, which affect the strain and mechanical dissipation in the resonators. This approach can be extended to investigate phase transitions in a wide range of materials. Our study demonstrates the feasibility of integrating ultrathin complex oxide membranes for realizing nanoelectromechanical systems on arbitrary substrates. △ Less

Submitted 30 April, 2019; originally announced May 2019.

Mass measurement of graphene using quartz crystal microbalances

Authors: Robin J. Dolleman, Mick Hsu, Sten Vollebregt, John E. Sader, Herre S. J. van der Zant, Peter G. Steeneken, Murali K. Ghatkesar

Abstract: Current wafer-scale fabrication methods for graphene-based electronics and sensors involve the transfer of single-layer graphene by a support polymer. This often leaves some polymer residue on the graphene, which can strongly impact its electronic, thermal, and mechanical resonance properties. To assess the cleanliness of graphene fabrication methods, it is thus of considerable interest to quantif… ▽ More Current wafer-scale fabrication methods for graphene-based electronics and sensors involve the transfer of single-layer graphene by a support polymer. This often leaves some polymer residue on the graphene, which can strongly impact its electronic, thermal, and mechanical resonance properties. To assess the cleanliness of graphene fabrication methods, it is thus of considerable interest to quantify the amount of contamination on top of the graphene. Here, we present a methodology for direct measurement of the mass of the graphene sheet using quartz crystal microbalances (QCM). By monitoring the QCM resonance frequency during removal of graphene in an oxygen plasma, the total mass of the graphene and contamination is determined with sub-graphene-monolayer accuracy. Since the etch-rate of the contamination is higher than that of graphene, quantitative measurements of the mass of contaminants below, on top, and between graphene layers are obtained. We find that polymer-based dry transfer methods can increase the mass of a graphene sheet by a factor of 10. The presented mass measurement method is conceptually straightforward to interpret and can be used for standardized testing of graphene transfer procedures in order to improve the quality of graphene devices in future applications. △ Less

Submitted 28 February, 2019; originally announced February 2019.

High-frequency stochastic switching of graphene resonators near room temperature

Authors: Robin J. Dolleman, Pierpaolo Belardinelli, Samer Houri, Herre S. J. van der Zant, Farbod Alijani, Peter G. Steeneken

Abstract: Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few Hertz. Here, we employ graphene membra… ▽ More Stochastic switching between the two bistable states of a strongly driven mechanical resonator enables detection of weak signals based on probability distributions, in a manner that mimics biological systems. However, conventional silicon resonators at the microscale require a large amount of fluctuation power to achieve a switching rate in the order of a few Hertz. Here, we employ graphene membrane resonators of atomic thickness to achieve a stochastic switching rate of 7.8 kHz, which is 200 times faster than current state-of-the-art. The (effective) temperature of the fluctuations is approximately 400 K, which is 3000 times lower than the state-of-the-art. This shows that these membranes are potentially useful to transduce weak signals in the audible frequency domain. Furthermore, we perform numerical simulations to understand the transition dynamics of the resonator and derive simple analytical expressions to investigate the relevant scaling parameters that allow high-frequency, low-temperature stochastic switching to be achieved in mechanical resonators. △ Less

Submitted 21 December, 2018; originally announced December 2018.

Transient thermal characterization of suspended monolayer MoS$_2$

Authors: Robin J. Dolleman, David Lloyd, J. Scott Bunch, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: We measure the thermal time constants of suspended single layer molybdenum disulfide drums by their thermomechanical response to a high-frequency modulated laser. From this measurement the thermal diffusivity of single layer MoS$_2$ is found to be 1.14 $\times$ 10$^{-5}$ m$^2$/s on average. Using a model for the thermal time constants and a model assuming continuum heat transport, we extract therm… ▽ More We measure the thermal time constants of suspended single layer molybdenum disulfide drums by their thermomechanical response to a high-frequency modulated laser. From this measurement the thermal diffusivity of single layer MoS$_2$ is found to be 1.14 $\times$ 10$^{-5}$ m$^2$/s on average. Using a model for the thermal time constants and a model assuming continuum heat transport, we extract thermal conductivities at room temperature between 10 to 40 W/(m$\cdot$K). Significant device-to-device variation in the thermal diffusivity is observed. Based on statistical analysis we conclude that these variations in thermal diffusivity are caused by microscopic defects that have a large impact on phonon scattering, but do not affect the resonance frequency and damping of the membrane's lowest eigenmode. By combining the experimental thermal diffusivity with literature values of the thermal conductivity, a method is presented to determine the specific heat of suspended 2D materials, which is estimated to be 255 $\pm$ 104 J/(kg$\cdot$K) for single layer MoS$_2$. △ Less

Submitted 28 June, 2018; originally announced June 2018.

Journal ref: Phys. Rev. Materials 2, 114008 (2018)

Modal analysis for determining the size-and temperature-dependent bending rigidity of graphene

Authors: Banafsheh Sajadi, Simon van Hemert, Behrouz Arash, Pierpaolo Belardinelli, Peter G. Steeneken, Farbod Alijani

Abstract: The bending rigidity of two-dimensional (2D) materials is a key parameter for understanding the mechanics of 2D NEMS devices. The apparent bending rigidity of graphene membranes at macroscopic scale differs from theoretical predictions at micro-scale. This difference is believed to originate from thermally induced dynamic ripples in the atomically thin membrane. In this paper, we perform modal ana… ▽ More The bending rigidity of two-dimensional (2D) materials is a key parameter for understanding the mechanics of 2D NEMS devices. The apparent bending rigidity of graphene membranes at macroscopic scale differs from theoretical predictions at micro-scale. This difference is believed to originate from thermally induced dynamic ripples in the atomically thin membrane. In this paper, we perform modal analysis to estimate the effective macroscopic bending rigidity of graphene membranes from the frequency spectrum of their Brownian motion. Our method is based on fitting the resonance frequencies obtained from the Brownian motion in molecular dynamics simulations, to those obtained from a continuum mechanics model, with bending rigidity and pretension as the fit parameters. In this way, the effective bending rigidity of the membrane and its temperature and size dependence, are extracted, while including the effects of dynamic ripples and thermal fluctuations. The proposed method provides a framework for estimating the macroscopic mechanical properties at high frequencies in other two-dimensional nano-structures at finite temperatures. △ Less

Submitted 12 March, 2018; originally announced March 2018.

Graphene multi-mode parametric oscillators

Authors: Robin J. Dolleman, Samer Houri, Abhilash Chandrashekar, Farbod Alijani, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: In the field of nanomechanics, parametric excitations are of interest since they can greatly enhance sensing capabilities and eliminate cross-talk. However, parametric excitations often rely on externally tuned springs, which limits their application to high quality factor resonators and usually does not allow excitation of multiple higher modes into parametric resonance. Here we demonstrate param… ▽ More In the field of nanomechanics, parametric excitations are of interest since they can greatly enhance sensing capabilities and eliminate cross-talk. However, parametric excitations often rely on externally tuned springs, which limits their application to high quality factor resonators and usually does not allow excitation of multiple higher modes into parametric resonance. Here we demonstrate parametric amplification and resonance of suspended single-layer graphene membranes by an efficient opto-thermal drive that modulates the intrinsic spring constant. With a large amplitude of the optical drive, a record number of 14 mechanical modes can be brought into parametric resonance by modulating a single parameter: the pretension. In contrast to conventional mechanical resonators, it is shown that graphene membranes demonstrate an interesting combination of both strong nonlinear stiffness and nonlinear damping. △ Less

Submitted 23 November, 2017; originally announced November 2017.

Journal ref: Scientific Reports volume 8, Article number: 9366 (2018)

Amplitude calibration of 2D mechanical resonators by nonlinear optical transduction

Authors: Robin J. Dolleman, Dejan Davidovikj, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Contactless characterization of mechanical resonances using Fabry-Perot interferometry is a powerful tool to study the mechanical and dynamical properties of atomically thin membranes. However, amplitude calibration is often not performed, or only possible by making assumptions on the device parameters such as its mass or the temperature. In this work, we demonstrate a calibration technique that d… ▽ More Contactless characterization of mechanical resonances using Fabry-Perot interferometry is a powerful tool to study the mechanical and dynamical properties of atomically thin membranes. However, amplitude calibration is often not performed, or only possible by making assumptions on the device parameters such as its mass or the temperature. In this work, we demonstrate a calibration technique that directly measures the oscillation amplitude by detecting higher harmonics that arise from nonlinearities in the optical transduction. Employing this technique, we calibrate the resonance amplitude of two-dimensional nanomechanical resonators, without requiring knowledge of their mechanical properties, actuation force, geometric distances or the laser intensity. △ Less

Submitted 16 November, 2017; originally announced November 2017.

Young's modulus of 2D materials extracted from their nonlinear dynamic response

Authors: Dejan Davidovikj, Farbod Alijani, Santiago J. Cartamil-Bueno, Herre S. J. van der Zant, Marco Amabili, Peter G. Steeneken

Abstract: Due to their atomic-scale thickness, the resonances of 2D material membranes show signatures of nonlinearities at amplitudes of only a few nanometers. While the linear dynamics of membranes is well understood, the exact relation between the nonlinear response and the resonator's material properties has remained elusive. In this work, we propose a method to determine the Young's modulus of suspende… ▽ More Due to their atomic-scale thickness, the resonances of 2D material membranes show signatures of nonlinearities at amplitudes of only a few nanometers. While the linear dynamics of membranes is well understood, the exact relation between the nonlinear response and the resonator's material properties has remained elusive. In this work, we propose a method to determine the Young's modulus of suspended 2D material membranes from their nonlinear dynamic response. The method is demonstrated by interferometric measurements on graphene and MoS2 resonators, which are electrostatically driven into the nonlinear regime at multiple driving forces. It is shown that a set of response curves can be fitted by the solutions of the Duffing equation using only one fit parameter, from which the Young's modulus is extracted using membrane theory. Our method is fast, contactless, and provides a platform for high-frequency characterization of the mechanical properties of 2D materials. △ Less

Submitted 18 April, 2017; originally announced April 2017.

Journal ref: Nature Communications 8, 1253 (2017)

Optomechanics for thermal characterization of suspended graphene

Authors: Robin J. Dolleman, Samer Houri, Dejan Davidovikj, Santiago J. Cartamil-Bueno, Yaroslav M. Blanter, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Thermal properties of suspended single-layer graphene membranes are investigated by characterization of their mechanical motion in response to a high-frequency modulated laser. A characteristic delay time $τ$ between the optical intensity and mechanical motion is observed, which is attributed to the time required to raise the temperature of the membrane. We find, however, that the measured time co… ▽ More Thermal properties of suspended single-layer graphene membranes are investigated by characterization of their mechanical motion in response to a high-frequency modulated laser. A characteristic delay time $τ$ between the optical intensity and mechanical motion is observed, which is attributed to the time required to raise the temperature of the membrane. We find, however, that the measured time constants are significantly larger than the predicted ones based on values of the specific heat and thermal conductivity. In order to explain the discrepancy between measured and modeled tau, a model is proposed that takes a thermal boundary resistance at the edge of the graphene drum into account. The measurements provide a noninvasive way to characterize thermal properties of suspended atomically thin membranes, providing information that can be hard to obtain by other means. △ Less

Submitted 22 February, 2017; originally announced February 2017.

Journal ref: Phys. Rev. B 96, 165421 (2017)

Direct and parametric synchronization of a graphene self-oscillator

Authors: S. Houri, S. J. Cartamil-Bueno, M. Poot, P. G. Steeneken, H. S. J. van der Zant, W. J. Venstra

Abstract: We explore the dynamics of a graphene nanomechanical oscillator coupled to a reference oscillator. Circular graphene drums are forced into self-oscillation, at a frequency fosc, by means of photothermal feedback induced by illuminating the drum with a continuous-wave red laser beam. Synchronization to a reference signal, at a frequency fsync, is achieved by shining a power-modulated blue laser ont… ▽ More We explore the dynamics of a graphene nanomechanical oscillator coupled to a reference oscillator. Circular graphene drums are forced into self-oscillation, at a frequency fosc, by means of photothermal feedback induced by illuminating the drum with a continuous-wave red laser beam. Synchronization to a reference signal, at a frequency fsync, is achieved by shining a power-modulated blue laser onto the structure. We investigate two regimes of synchronization as a function of both detuning and signal strength for direct (fsync = fosc) and parametric locking (fsync = 2fosc). We detect a regime of phase resonance, where the phase of the oscillator behaves as an underdamped second-order system, with the natural frequency of the phase resonance showing a clear power-law dependence on the locking signal strength. The phase resonance is qualitatively reproduced using a forced van der Pol-Duffing-Mathieu equation. △ Less

Submitted 17 January, 2017; originally announced January 2017.

Comments: 11 pages, 4 figures, 25 references

Colorimetry technique for scalable characterization of suspended graphene

Authors: Santiago J. Cartamil-Bueno, Peter G. Steeneken, Alba Centeno, Amaia Zurutuza, Herre S. J. van der Zant, Samer Houri

Abstract: Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, non-invasive, and affordable way of characterizing suspended graphene devices. We exploit Newton rings interference p… ▽ More Previous statistical studies on the mechanical properties of chemical-vapor-deposited (CVD) suspended graphene membranes have been performed by means of measuring individual devices or with techniques that affect the material. Here, we present a colorimetry technique as a parallel, non-invasive, and affordable way of characterizing suspended graphene devices. We exploit Newton rings interference patterns to study the deformation of a double-layer graphene drum 13.2 micrometer in diameter when a pressure step is applied. By studying the time evolution of the deformation, we find that filling the drum cavity with air is 2-5 times slower than when it is purged. △ Less

Submitted 17 August, 2016; originally announced August 2016.

Graphene Gas Osmometers

Authors: Robin J. Dolleman, Santiago J. Cartamil-Bueno, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: Here it is shown that graphene membranes that separate 2 gases at identical pressure are deflected by osmotic pressure. The osmotic pressure is a consequence of differences in gas permeation rates into a graphene enclosed cavity. The deflection of the few layer graphene membranes is detected by an interferometric technique for measuring their tension-induced resonance frequency. Using a calibratio… ▽ More Here it is shown that graphene membranes that separate 2 gases at identical pressure are deflected by osmotic pressure. The osmotic pressure is a consequence of differences in gas permeation rates into a graphene enclosed cavity. The deflection of the few layer graphene membranes is detected by an interferometric technique for measuring their tension-induced resonance frequency. Using a calibration measurement of the relation between resonance frequency and pressure, the time dependent osmotic pressure on the graphene is extracted. The osmotic pressure for different combinations of gases shows large differences that can be accounted for by a model based on the different gas permeation rates. Thus a graphene membrane based gas osmometer with a responsitivity of ~60 kHz/mbar and nanoscale dimensions is demonstrated. △ Less

Submitted 17 June, 2016; originally announced June 2016.

Visualizing the motion of graphene nanodrums

Authors: Dejan Davidovikj, Jesse J. Slim, Santiago J. Cartamil - Bueno, Herre S. J. van der Zant, Peter G. Steeneken, Warner J. Venstra

Abstract: Membranes of suspended two-dimensional materials show a large variability in mechanical properties, in part due to static and dynamic wrinkles. As a consequence, experiments typically show a multitude of nanomechanical resonance peaks, which makes an unambiguous identification of the vibrational modes difficult. Here, we probe the motion of graphene nanodrum resonators with spatial resolution usin… ▽ More Membranes of suspended two-dimensional materials show a large variability in mechanical properties, in part due to static and dynamic wrinkles. As a consequence, experiments typically show a multitude of nanomechanical resonance peaks, which makes an unambiguous identification of the vibrational modes difficult. Here, we probe the motion of graphene nanodrum resonators with spatial resolution using a phase-sensitive interferometer. By simultaneously visualizing the local phase and amplitude of the driven motion, we show that unexplained spectral features represent split degenerate modes. When taking these into account, the resonance frequencies up to the eighth vibrational mode agree with theory. The corresponding displacement profiles however, are remarkably different from theory, as small imperfections increasingly deform the nodal lines for the higher modes. The Brownian motion, which is used to calibrate the local displacement, exhibits a similar mode pattern. The experiments clarify the complicated dynamic behaviour of suspended two-dimensional materials, which is crucial for reproducible fabrication and applications. △ Less

Submitted 30 January, 2016; originally announced February 2016.

Journal ref: Nano Lett. 2016 16 (4) 2768-2773

Graphene Squeeze-Film Pressure Sensors

Authors: Robin J. Dolleman, Dejan Davidovikj, Santiago J. Cartamil-Bueno, Herre S. J. van der Zant, Peter G. Steeneken

Abstract: The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required, but also minimization of the membrane's mass is essential to maximize responsivity. Here, we demonstrate… ▽ More The operating principle of squeeze-film pressure sensors is based on the pressure dependence of a membrane's resonance frequency, caused by the compression of the surrounding gas which changes the resonator stiffness. To realize such sensors, not only strong and flexible membranes are required, but also minimization of the membrane's mass is essential to maximize responsivity. Here, we demonstrate the use of a few-layer graphene membrane as a squeeze-film pressure sensor. A clear pressure dependence of the membrane's resonant frequency is observed, with a frequency shift of 4 MHz between 8 and 1000 mbar. The sensor shows a reproducible response and no hysteresis. The measured responsivity of the device is 9000 Hz/mbar, which is a factor 45 higher than state-of-the-art MEMS-based squeeze-film pressure sensors while using a 25 times smaller membrane area. △ Less

Submitted 23 October, 2015; originally announced October 2015.

High-Q Tantalum Oxide Nanomechanical Resonators by Laser-Oxidation of TaSe2

Authors: Santiago J. Cartamil-Bueno, Peter G. Steeneken, Frans D. Tichelaar, Efren Navarro-Moratalla, Warner J. Venstra, Ronald van Leeuwen, Eugenio Coronado, Herre S. J. van der Zant, Gary A. Steele, Andres Castellanos-Gomez

Abstract: Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichal… ▽ More Controlling the strain in two-dimensional materials is an interesting avenue to tailor the mechanical properties of nanoelectromechanical systems. Here we demonstrate a technique to fabricate ultrathin tantalum oxide nanomechanical resonators with large stress by laser-oxidation of nano-drumhead resonators made out of tantalum diselenide (TaSe2), a layered 2D material belonging to the metal dichalcogenides. Prior to the study of their mechanical properties with a laser interferometer, we checked the oxidation and crystallinity of the freely-suspended tantalum oxide in a high-resolution electron microscope. We show that the stress of tantalum oxide resonators increase by 140 MPa (with respect to pristine TaSe2 resonators) which causes an enhancement of quality factor (14 times larger) and resonance frequency (9 times larger) of these resonators. △ Less

Submitted 19 May, 2015; v1 submitted 18 May, 2015; originally announced May 2015.

Parameter Extraction and Support-Loss in MEMS Resonators

Authors: P. G. Steeneken, J. J. M. Ruigrok, S. Kang, J. T. M. van Beek, J. Bontemps, J. J. Koning

Abstract: In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results… ▽ More In this paper it is shown how the equivalent circuit parameters of a MEMS resonator can be simply obtained from an eigenfrequency simulation. Additionally, it is demonstrated that the Q-factor as a result of support losses in a MEMS resonator can be determined using a matched boundary layer. The method is applied to calculate the frequency dependent admittance of a diamond disk resonator. Results agree well with measurements and analytic results. Comparison to a frequency response analysis establishes the validity of the method and shows that it results in a large reduction of the simulation time. △ Less

Submitted 30 April, 2013; originally announced April 2013.

Comments: 6 pages, 7 figures

Journal ref: Proceedings Comsol conference 2007, Grenoble, p. 725

New light on EuO thin films: preparation, transport, magnetism and spectroscopy of a ferromagnetic semiconductor

Authors: P. G. Steeneken

Abstract: This PhD thesis presents a study of the ferromagnetic semiconductor EuO. Chapter 1 gives a general introduction, chapter 2 presents a calculation of the magneto-optical spectrum. Chapter 3 deals with the epitaxial growth of EuO thin films by MBE. In chapter 4 experiments are used to study the spin-resolved band-structure. Chapter 5 discusses the temperature dependent X-ray absorption spectrum of E… ▽ More This PhD thesis presents a study of the ferromagnetic semiconductor EuO. Chapter 1 gives a general introduction, chapter 2 presents a calculation of the magneto-optical spectrum. Chapter 3 deals with the epitaxial growth of EuO thin films by MBE. In chapter 4 experiments are used to study the spin-resolved band-structure. Chapter 5 discusses the temperature dependent X-ray absorption spectrum of EuO and chapter 6 studies its magenetic circular dichroism spectrum. Chapter 7 discusses magnetotransport and phototransport measurement and theory on EuO. Chapter 8 deals with the nature of doping in the high-Tc cuprates. This work was supervised by G.A. Sawatzky and L.H. Tjeng. △ Less

Submitted 30 March, 2012; originally announced March 2012.

Comments: This thesis can also be found at http://dissertations.ub.rug.nl/faculties/science/2002/p.g.steeneken/. The thesis work was performed in the period 1998-2002 under the supervision of G.A. Sawatzky and L.H. Tjeng

Journal ref: Chapters 4 and 8 have been published as Phys. Rev. Lett. 88, 047201 (2002) and Phys. Rev. Lett. 90, 247005 (2003), the other chapters will only be published on Arxiv.org

Piezoresistive heat engine and refrigerator

Authors: P. G. Steeneken, K. Le Phan, M. J. Goossens, G. E. J. Koops, G. J. A. M. Brom, C. van der Avoort, J. T. M. van Beek

Abstract: Heat engines provide most of our mechanical power and are essential for transportation on macroscopic scale. However, although significant progress has been made in the miniaturization of electrostatic engines, it has proven difficult to reduce the size of liquid or gas driven heat engines below 10^7 um^3. Here we demonstrate that a crystalline silicon structure operates as a cyclic piezoresistive… ▽ More Heat engines provide most of our mechanical power and are essential for transportation on macroscopic scale. However, although significant progress has been made in the miniaturization of electrostatic engines, it has proven difficult to reduce the size of liquid or gas driven heat engines below 10^7 um^3. Here we demonstrate that a crystalline silicon structure operates as a cyclic piezoresistive heat engine when it is driven by a sufficiently high DC current. A 0.34 um^3 engine beam draws heat from the DC current using the piezoresistive effect and converts it into mechanical work by expansion and contraction at different temperatures. This mechanical power drives a silicon resonator of 1.1x10^3 um^3 into sustained oscillation. Even below the oscillation threshold the engine beam continues to amplify the resonator's Brownian motion. When its thermodynamic cycle is inverted, the structure is shown to reduce these thermal fluctuations, therefore operating as a refrigerator. △ Less

Submitted 5 November, 2011; v1 submitted 19 January, 2010; originally announced January 2010.

Comments: Updated version after publication to make it almost identical to the Nature Physics article. During the review process the preprint v1 was merged with part of the results from arXiv:0904.3748 (please check this manuscript for more details on the measurements and simulations)

Journal ref: Nature Physics 7, 354-359 (2011)

Path following and numerical continuation methods for non-linear MEMS and NEMS

Authors: Peter G. Steeneken, Jiri Stulemeijer

Abstract: Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current and magnetic flux. Mechanical spring structures can cause additional non-linearities via material, geometrical and contact effects. For the design and operati… ▽ More Non-linearities play an important role in micro- and nano- electromechanical system (MEMS and NEMS) design. In common electrostatic and magnetic actuators, the forces and voltages can depend in a non-linear way on position, charge, current and magnetic flux. Mechanical spring structures can cause additional non-linearities via material, geometrical and contact effects. For the design and operation of non-linear MEMS devices it is essential to be able to model and simulate such non-linearities. However, when there are many degrees of freedom, it becomes difficult to find all equilibrium solutions of the non-linear equations and to determine their stability. In these cases path following methods can be a powerful mathematical tool. In this paper we will show how path following methods can be used to determine the equilibria and stability of electromechanical devices. Based on the energy, work and the Hamiltonian of electromechanical systems (section 1), the equations of motion (section 2), the equilibrium (section 3) and stability conditions (section 6) are derived. Examples of path following simulations (section 4) in Mathematica (section 5), Matcont (section 7) and using FEM methods in Comsol (section 8) are given to illustrate the methods. △ Less

Submitted 28 May, 2009; originally announced May 2009.

Spontaneous mechanical oscillation of a DC driven single crystal

Authors: Kim L. Phan, Peter G. Steeneken, Martijn J. Goossens, Gerhard E. J. Koops, Greja J. A. M. Verheijden, Joost T. M. van Beek

Abstract: There is a large interest to decrease the size of mechanical oscillators since this can lead to miniaturization of timing and frequency referencing devices, but also because of the potential of small mechanical oscillators as extremely sensitive sensors. Here we show that a single crystal silicon resonator structure spontaneously starts to oscillate when driven by a constant direct current (DC).… ▽ More There is a large interest to decrease the size of mechanical oscillators since this can lead to miniaturization of timing and frequency referencing devices, but also because of the potential of small mechanical oscillators as extremely sensitive sensors. Here we show that a single crystal silicon resonator structure spontaneously starts to oscillate when driven by a constant direct current (DC). The mechanical oscillation is sustained by an electrothermomechanical feedback effect in a nanobeam, which operates as a mechanical displacement amplifier. The displacement of the resonator mass is amplified, because it modulates the resistive heating power in the nanobeam via the piezoresistive effect, which results in a temperature variation that causes a thermal expansion feedback-force from the nanobeam on the resonator mass. This self-amplification effect can occur in almost any conducting material, but is particularly effective when the current density and mechanical stress are concentrated in beams of nano-scale dimensions. △ Less

Submitted 23 April, 2009; originally announced April 2009.

Journal ref: Nature Physics (2011), merged with arXiv:1001.3170, Piezoresistive heat engine and refrigerator