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HiPIMS deposition of superconducting Nb thin films onto Cu substrates / Leith, S (Siegen U. ; CERN) ; Qiao, J (Siegen U.) ; Vogel, M (Siegen U.) ; Seiler, E (Kosice, IEF) ; Ries, R (Kosice, IEF) ; Li, Y (Siegen U.) ; Wiktor, C (Siegen U.) ; Mueller, J (Siegen U.) ; Sakalli, Y (Siegen U.) ; Butz, B (Siegen U.) et al.
The use of energetic condensation techniques, such as HiPIMS, has the potential to significantly improve the superconducting performance of coated Cu cavities by producing bulk-like Nb thin films. However, in order to benefit from these techniques, a deeper understanding of the effects of, and the relationship between, the different deposition parameters, the physical properties of the deposited films and the superconducting performance of the films, is still required. [...]
2023 - 14 p. - Published in : Vacuum 212 (2023) 112041 Fulltext: PDF;

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