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The Study of Deep Lithography and Moulding Process of LIGA Technique / Guo, Yuhua ; Liu, Gang ; Kan, Ya ; Tian, Yangchao 2007 - Published in : AIP Conf. Proc.: 879 (2007) , pp. 1494-1498 External link: Published version from AIP In : 9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1494-1498 Rekord szczegółowy

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