Fournel, F. - Resultados da pesquisa

Pesquisar colecções:

Ordenar por:	Display results:	Output format:

CERN Document Server	1 records found	Search took 0.54 seconds.

Transient current technique for charged traps detection in silicon bonded interfaces / Bronuzzi, J (CERN ; Ecole Polytechnique, Lausanne) ; Bouvet, D. (Ecole Polytechnique, Lausanne) ; Charrier, C. (CEA-DTA-LETI, Grenoble) ; Fournel, F. (CEA-DTA-LETI, Grenoble) ; García, M.F. (CERN ; Cantabria Inst. of Phys.) ; Mapelli, A. (CERN) ; Moll, M. (CERN) ; Rouchouze, E. (CEA-DTA-LETI, Grenoble) ; Sallese, J.M. (Ecole Polytechnique, Lausanne)
Wafer bonding is an established technology for the manufacturing of silicon-on-insulator (SOI) substrates, micro-electromechanical systems (MEMS) and microfluidic devices. Low temperature direct bonding techniques can be of particular interest for the fabrication of monolithic radiation sensors. [...]
2019 - Published in : AIP Adv. 9 (2019) 025307 Fulltext: PDF;

Registo detalhado - Registos similares

Interested in being notified about new results for this query?
Set up a personal email alert or subscribe to the RSS feed.

Haven't found what you were looking for? Try your search on other servers:
Fournel, F. em Amazon Fournel, F. em CERN EDMS Fournel, F. em CERN Intranet Fournel, F. em CiteSeer Fournel, F. em Google Books Fournel, F. em Google Scholar Fournel, F. em Google Web Fournel, F. em IEC	Fournel, F. em IHS Fournel, F. em INSPIRE Fournel, F. em ISO Fournel, F. em KISS Books/Journals Fournel, F. em KISS Preprints Fournel, F. em NEBIS Fournel, F. em SLAC Library Catalog Fournel, F. em Scirus

CERN Document Server

Access articles, reports and multimedia content in HEP

Main menu

CERN Accelerating science