CERN Accelerating science

Article
Title	Characterization of 3D Trench PZT Capacitors for High Density FRAM Devices by Synchrotron X-ray Micro-diffraction
Author(s)	Shin, Sangmin ; Han, Hee ; JunPark, Yong ; Choi, Jae-Young ; Park, Youngsoo ; Baik, Sunggi
Publication	2007
In:	AIP Conf. Proc. 879 (2007) pp.1554-1556
In:	9th International Conference On Synchrotron Radiation Instrumentation, Daegu, Korea, 28 May - 2 Jun 2006, pp.1554-1556