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Article
Title	Germanium ion implantation to Improve Crystallinity during Solid Phase Epitaxy and the effect of AMU Contamination
Author(s)	Lee, K S ; Yoo, D H ; Son, G H ; Lee, C H ; Noh, J H ; Han, J J ; Yu, Y S ; Hyung, Y W ; Yang, J K ; Song, D G ; Lim, T J ; Kim, Y K ; Lee, S C ; Lee, H D ; Moon, J T
Publication	2006
In:	AIP Conf. Proc. 866 (2006) pp.140-143
In:	16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.140-143