CERN Accelerating science

Article
Title	Impact of Fluorine co-implant on Boron Diffusion during Non-melt Laser Annealing
Author(s)	Noda, T ; Felch, S ; Parihar, V ; Vrancken, C ; Janssens, T ; Bender, H ; VanDaele, B ; Vandervorst, W
Publication	2006
In:	AIP Conf. Proc. 866 (2006) pp.21-24
In:	16th International Conference on Ion Implantation Technology, Marseilles, France, 11 - 16 Jun 2006, pp.21-24